Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9401261 | Ozone supplying apparatus, ozone supplying method, and charged particle beam drawing system | Yasuyuki Taneda | 2016-07-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9401261 | Ozone supplying apparatus, ozone supplying method, and charged particle beam drawing system | Yasuyuki Taneda | 2016-07-26 |