Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472372 | Charged particle beam writing apparatus and charged particle beam writing method | Kaoru Tsuruta, Yasuyuki Taneda, Kenji Ohtoshi | 2016-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472372 | Charged particle beam writing apparatus and charged particle beam writing method | Kaoru Tsuruta, Yasuyuki Taneda, Kenji Ohtoshi | 2016-10-18 |