Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466461 | Rotation angle measuring method of multi-charged particle beam image, rotation angle adjustment method of multi-charged particle beam image, and multi-charged particle beam writing apparatus | Kenji Ohtoshi | 2016-10-11 |
| 9460892 | Charged particle beam writing method, computer-readable recording medium, and charged particle beam writing apparatus | Sumito Nakada, Hikaru Yamamura, Hideyuki Tsurumaki | 2016-10-04 |
| 9236154 | Charged-particle beam drawing method, computer-readable recording media, and charged-particle beam drawing apparatus | Sumito Nakada, Hikaru Yamamura | 2016-01-12 |