Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460892 | Charged particle beam writing method, computer-readable recording medium, and charged particle beam writing apparatus | Sumito Nakada, Hikaru Yamamura, Osamu Iizuka | 2016-10-04 |