Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460892 | Charged particle beam writing method, computer-readable recording medium, and charged particle beam writing apparatus | Sumito Nakada, Osamu Iizuka, Hideyuki Tsurumaki | 2016-10-04 |
| 9236154 | Charged-particle beam drawing method, computer-readable recording media, and charged-particle beam drawing apparatus | Sumito Nakada, Osamu Iizuka | 2016-01-12 |