Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530679 | Method and apparatus for chuck thermal calibration | Neil Benjamin | 2016-12-27 |
| 9412555 | Lower electrode assembly of plasma processing chamber | Jason Augustino, Quan Chau, Hanh Tuong Ha, Brett C. Richardson, Harmeet Singh | 2016-08-09 |
| 9392643 | Heating plate with planar heater zones for semiconductor processing | Harmeet Singh, Neil Benjamin, Keith Comendant | 2016-07-12 |