Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437400 | Insulated dielectric window assembly of an inductively coupled plasma processing apparatus | David Setton, Gautam Bhattacharyya | 2016-09-06 |
| 9412555 | Lower electrode assembly of plasma processing chamber | Jason Augustino, Quan Chau, Keith Gaff, Hanh Tuong Ha, Harmeet Singh | 2016-08-09 |