Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507248 | Two-beam interference apparatus and two-beam interference exposure system | Shinji Okazaki, Hakaru Mizoguchi, Takashi Matsunaga, Kouji Kakizaki, Osamu Wakabayashi | 2016-11-29 |
| 9373926 | Laser chamber and discharge excitation gas laser apparatus | Hiroaki TSUSHIMA, Hakaru Mizoguchi, Hiroaki Nakarai, Natsushi Suzuki | 2016-06-21 |