Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460959 | Methods for pre-cleaning conductive interconnect structures | Xiangjin Xie, Feng Q. Liu, Daping Yao, Alexander Jansen, Adolph Miller Allen +2 more | 2016-10-04 |
| 9315891 | Methods for processing a substrate using multiple substrate support positions | William Johanson, Keith A. Miller, Alan A. Ritchie | 2016-04-19 |