Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412579 | Methods and apparatus for controlling substrate uniformity | S. M. Reza Sadjadi, Dmitry Lubomirsky, Hamid Noorbakhsh, John Zheng Ye, Sean S. Kang | 2016-08-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412579 | Methods and apparatus for controlling substrate uniformity | S. M. Reza Sadjadi, Dmitry Lubomirsky, Hamid Noorbakhsh, John Zheng Ye, Sean S. Kang | 2016-08-09 |