Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472506 | Registration mark formation during sidewall image transfer process | David J. Conklin, Sivananda K. Kanakasabapathy, Byeong Y. Kim, Fee Li Lie, Stuart A. Sieg | 2016-10-18 |
| 9360858 | Alignment data based process control system | Christopher P. Ausschnitt, Timothy A. Brunner, Oleg Gluschenkov, Vinayan C. Menon | 2016-06-07 |