Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9411223 | On-product focus offset metrology for use in semiconductor chip manufacturing | — | 2016-08-09 |
| 9411249 | Differential dose and focus monitor | Christopher P. Ausschnitt | 2016-08-09 |
| 9360858 | Alignment data based process control system | Christopher P. Ausschnitt, Allen H. Gabor, Oleg Gluschenkov, Vinayan C. Menon | 2016-06-07 |
| 9310674 | Mask that provides improved focus control using orthogonal edges | Jaione Tirapu Azpiroz, Alan E. Rosenbluth | 2016-04-12 |