Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9411249 | Differential dose and focus monitor | Timothy A. Brunner | 2016-08-09 |
| 9360858 | Alignment data based process control system | Timothy A. Brunner, Allen H. Gabor, Oleg Gluschenkov, Vinayan C. Menon | 2016-06-07 |
| 9257351 | Metrology marks for bidirectional grating superposition patterning processes | Nelson Felix, Scott Halle | 2016-02-09 |