Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9257351 | Metrology marks for bidirectional grating superposition patterning processes | Christopher P. Ausschnitt, Scott Halle | 2016-02-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9257351 | Metrology marks for bidirectional grating superposition patterning processes | Christopher P. Ausschnitt, Scott Halle | 2016-02-09 |