Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9257351 | Metrology marks for bidirectional grating superposition patterning processes | Christopher P. Ausschnitt, Nelson Felix | 2016-02-09 |
SH
Scott Halle
Overall (2016): #236,776 of 481,213Top 50%
1
Patents 2016