Issued Patents 2016
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472415 | Directional chemical oxide etch technique | Emre Alptekin, Sivananda K. Kanakasabapathy, Viraj Y. Sardesai, Cung D. Tran | 2016-10-18 |
| 9472406 | Metal semiconductor alloy contact resistance improvement | Emre Alptekin, Nicolas L. Breil, Christian Lavoie, Kathryn T. Schonenberg | 2016-10-18 |
| 9449827 | Metal semiconductor alloy contact resistance improvement | Emre Alptekin, Nicolas L. Breil, Christian Lavoie, Kathryn T. Schonenberg | 2016-09-20 |
| 9443772 | Diffusion-controlled semiconductor contact creation | Emre Alptekin, Nicolas L. Breil, Christian Lavoie, Kathryn T. Schonenberg, Keith Kwong Hon Wong | 2016-09-13 |
| 9425309 | Method for forming metal semiconductor alloys in contact holes and trenches | Christian Lavoie, Zhengwen Li, Filippos Papadatos, Chengwen Pei, Jian-Shen Yu | 2016-08-23 |
| 9397181 | Diffusion-controlled oxygen depletion of semiconductor contact interface | Emre Alptekin, Viraj Y. Sardesai, Kathryn T. Schonenberg, Cung D. Tran | 2016-07-19 |
| 9379012 | Oxide mediated epitaxial nickel disilicide alloy contact formation | Emre Alptekin, Nicolas L. Breil, Christian Lavoie, Kathryn T. Schonenberg | 2016-06-28 |
| 9373696 | Techniques to form uniform and stable silicide | Christian Lavoie, Dong-Ick Lee, Zhen Zhang | 2016-06-21 |
| 9293554 | Self-aligned liner formed on metal semiconductor alloy contacts | Nicolas L. Breil, Christian Lavoie, Kathryn T. Schonenberg, Jian-Shen Yu | 2016-03-22 |
| 9275866 | Gas cluster reactor for anisotropic film growth | Oleg Gluschenkov | 2016-03-01 |
| 9252050 | Method to improve semiconductor surfaces and polishing | Lindsey Hall, Michael Hatzistergos, Filippos Papadatos, Yiyi Wang | 2016-02-02 |
| 9236345 | Oxide mediated epitaxial nickel disilicide alloy contact formation | Emre Alptekin, Nicolas L. Breil, Christian Lavoie, Kathryn T. Schonenberg | 2016-01-12 |
| 9230857 | Method to improve semiconductor surfaces and polishing | Lindsey Hall, Michael Hatzistergos, Filippos Papadatos, Yiyi Wang | 2016-01-05 |