Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9382111 | Micromechanical system and method for manufacturing a micromechanical system | Thoralf Kautzsch, Heiko Froehlich, Mirko Vogt, Maik Stegemann, Boris Binder | 2016-07-05 |
| 9330929 | Systems and methods for horizontal integration of acceleration sensor structures | Thoralf Kautzsch, Heiko Fröhlich, Mirko Vogt, Maik Stegemann, Andre Röth | 2016-05-03 |
| 9263357 | Carrier with hollow chamber and support structure therein | — | 2016-02-16 |
| 9236241 | Wafer, a method for processing a wafer, and a method for processing a carrier | Thoralf Kautzsch, Alessia Scire, Uwe Rudolph, Marco Mueller, Boris Binder | 2016-01-12 |