Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9452923 | Method for manufacturing a micromechanical system comprising a removal of sacrificial material through a hole in a margin region | Thoralf Kautzsch, Mirko Vogt, Maik Stegemann | 2016-09-27 |
| 9382111 | Micromechanical system and method for manufacturing a micromechanical system | Thoralf Kautzsch, Mirko Vogt, Maik Stegemann, Boris Binder, Steffen Bieselt | 2016-07-05 |
| 9376314 | Method for manufacturing a micromechanical system | Thoralf Kautzsch, Mirko Vogt, Maik Stegemann, Boris Binder | 2016-06-28 |