Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9452923 | Method for manufacturing a micromechanical system comprising a removal of sacrificial material through a hole in a margin region | Thoralf Kautzsch, Heiko Froehlich, Mirko Vogt | 2016-09-27 |
| 9382111 | Micromechanical system and method for manufacturing a micromechanical system | Thoralf Kautzsch, Heiko Froehlich, Mirko Vogt, Boris Binder, Steffen Bieselt | 2016-07-05 |
| 9376314 | Method for manufacturing a micromechanical system | Thoralf Kautzsch, Heiko Froehlich, Mirko Vogt, Boris Binder | 2016-06-28 |
| 9330929 | Systems and methods for horizontal integration of acceleration sensor structures | Thoralf Kautzsch, Heiko Fröhlich, Mirko Vogt, Andre Röth, Steffen Bieselt | 2016-05-03 |