Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9527725 | Semiconductor structure with lamella defined by singulation trench | Bernd Foeste, Thoralf Kautzsch, Stefan Kolb, Marco Mueller | 2016-12-27 |
| 9382111 | Micromechanical system and method for manufacturing a micromechanical system | Thoralf Kautzsch, Heiko Froehlich, Mirko Vogt, Maik Stegemann, Steffen Bieselt | 2016-07-05 |
| 9376314 | Method for manufacturing a micromechanical system | Thoralf Kautzsch, Heiko Froehlich, Mirko Vogt, Maik Stegemann | 2016-06-28 |
| 9236241 | Wafer, a method for processing a wafer, and a method for processing a carrier | Thoralf Kautzsch, Alessia Scire, Steffen Bieselt, Uwe Rudolph, Marco Mueller | 2016-01-12 |