Issued Patents 2016
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9527725 | Semiconductor structure with lamella defined by singulation trench | Boris Binder, Bernd Foeste, Stefan Kolb, Marco Mueller | 2016-12-27 |
| 9452923 | Method for manufacturing a micromechanical system comprising a removal of sacrificial material through a hole in a margin region | Heiko Froehlich, Mirko Vogt, Maik Stegemann | 2016-09-27 |
| 9431554 | Semiconductor light trap device | — | 2016-08-30 |
| 9382111 | Micromechanical system and method for manufacturing a micromechanical system | Heiko Froehlich, Mirko Vogt, Maik Stegemann, Boris Binder, Steffen Bieselt | 2016-07-05 |
| 9376314 | Method for manufacturing a micromechanical system | Heiko Froehlich, Mirko Vogt, Maik Stegemann, Boris Binder | 2016-06-28 |
| 9368654 | Photodetector and method for manufacturing the same | — | 2016-06-14 |
| 9330929 | Systems and methods for horizontal integration of acceleration sensor structures | Heiko Fröhlich, Mirko Vogt, Maik Stegemann, Andre Röth, Steffen Bieselt | 2016-05-03 |
| 9318633 | Photodetector with controllable spectral response | — | 2016-04-19 |
| 9293529 | Semiconductor device with an array of lamellas and a micro-electro-mechanical resonator | — | 2016-03-22 |
| 9236241 | Wafer, a method for processing a wafer, and a method for processing a carrier | Alessia Scire, Steffen Bieselt, Uwe Rudolph, Marco Mueller, Boris Binder | 2016-01-12 |