Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530700 | Method of fabricating vertical field effect transistors with protective fin liner during bottom spacer recess etch | Hari V. Mallela, Reinaldo Vega | 2016-12-27 |
| 9466680 | Integrated multiple gate length semiconductor device including self-aligned contacts | Su Chen Fan, Balasubramanian Pranatharthiharan | 2016-10-11 |
| 9437503 | Vertical FETs with variable bottom spacer recess | Hari V. Mallela, Reinaldo Vega | 2016-09-06 |
| 9431305 | Vertical transistor fabrication and devices | Brent A. Anderson, Bruce B. Doris, Seong-Dong Kim | 2016-08-30 |
| 9373524 | Die level chemical mechanical polishing | Rishikesh Krishnan | 2016-06-21 |
| 9293551 | Integrated multiple gate length semiconductor device including self-aligned contacts | Su Chen Fan, Balasubramanian Pranatharthiharan | 2016-03-22 |