Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449849 | Method of manufacturing semiconductor device using meander-shaped heating element | Hitoshi Murata, Tetsuya Kosugi | 2016-09-20 |
| 9418881 | Substrate processing apparatus capable of switching control mode of heater | Masaaki Ueno, Kazuo Tanaka, Masashi Sugishita, Hideto Yamaguchi, Kenji Shirako | 2016-08-16 |