Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460946 | Substrate processing apparatus and heating equipment | Tetsuya Kosugi | 2016-10-04 |
| 9449849 | Method of manufacturing semiconductor device using meander-shaped heating element | Tetsuya Kosugi, Shinobu Sugiura | 2016-09-20 |