Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460946 | Substrate processing apparatus and heating equipment | Hitoshi Murata | 2016-10-04 |
| 9449849 | Method of manufacturing semiconductor device using meander-shaped heating element | Hitoshi Murata, Shinobu Sugiura | 2016-09-20 |
| 9269638 | Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor device | Masaaki Ueno, Hideto Yamaguchi | 2016-02-23 |