Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418881 | Substrate processing apparatus capable of switching control mode of heater | Shinobu Sugiura, Kazuo Tanaka, Masashi Sugishita, Hideto Yamaguchi, Kenji Shirako | 2016-08-16 |
| 9269638 | Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor device | Tetsuya Kosugi, Hideto Yamaguchi | 2016-02-23 |