Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418881 | Substrate processing apparatus capable of switching control mode of heater | Shinobu Sugiura, Masaaki Ueno, Kazuo Tanaka, Masashi Sugishita, Hideto Yamaguchi | 2016-08-16 |