| 9508527 |
Sample base, charged particle beam device and sample observation method |
Yusuke Ominami, Takashi Ohshima |
2016-11-29 |
| 9466457 |
Observation apparatus and optical axis adjustment method |
Yusuke Ominami, Mami Konomi, Shinsuke Kawanishi |
2016-10-11 |
| 9466460 |
Charged particle-beam device and specimen observation method |
Yusuke Ominami, Taku Sakazume |
2016-10-11 |
| 9418818 |
Charged particle beam device and sample observation method |
Yusuke Ominami |
2016-08-16 |
| 9287083 |
Charged particle beam device |
Shinichi Tomita, Wataru Kotake |
2016-03-15 |
| 9263232 |
Charged particle beam device |
Yusuke Ominami, Shinsuke Kawanishi, Tomohisa Ohtaki, Masahiko Ajima |
2016-02-16 |
| 9236217 |
Inspection or observation apparatus and sample inspection or observation method |
Yusuke Ominami, Mami Konomi, Tomohisa Ohtaki, Shinsuke Kawanishi |
2016-01-12 |