Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507263 | Underlay film composition for imprints and method of forming pattern and pattern formation method using the same | Kunihiko Kodama, Shinji Tarutani, Tadashi OOMATSU, Takayuki Ito, Hirotaka KITAGAWA +1 more | 2016-11-29 |
| 9482958 | Method of forming pattern and developer for use in the method | Shinji Tarutani, Sou Kamimura, Kaoru Iwato, Keita Kato, Kana Fujii | 2016-11-01 |
| 9263289 | Adhesion-promoting composition used between curable composition for imprints and substrate, and semiconductor device using the same | Akiko HATTORI, Hirotaka KITAGAWA | 2016-02-16 |