Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507263 | Underlay film composition for imprints and method of forming pattern and pattern formation method using the same | Kunihiko Kodama, Shinji Tarutani, Yuichiro Enomoto, Tadashi OOMATSU, Takayuki Ito +1 more | 2016-11-29 |
| 9308676 | Method for producing molds | Akihiko OHTSU, Katsuhiro Nishimaki | 2016-04-12 |
| 9263289 | Adhesion-promoting composition used between curable composition for imprints and substrate, and semiconductor device using the same | Hirotaka KITAGAWA, Yuichiro Enomoto | 2016-02-16 |