Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507263 | Underlay film composition for imprints and method of forming pattern and pattern formation method using the same | Kunihiko Kodama, Shinji Tarutani, Yuichiro Enomoto, Takayuki Ito, Hirotaka KITAGAWA +1 more | 2016-11-29 |