| 9484212 |
Chemical mechanical polishing method |
Bainian Qian, Yi Guo, George C. Jacob |
2016-11-01 |
| 9446497 |
Broad spectrum, endpoint detection monophase olefin copolymer window with specific composition in multilayer chemical mechanical polishing pad |
Angus Repper, Mary Anne Leugers, David B. James |
2016-09-20 |
| 9333620 |
Chemical mechanical polishing pad with clear endpoint detection window |
Bainian Qian |
2016-05-10 |
| 9314897 |
Chemical mechanical polishing pad with endpoint detection window |
Bainian Qian |
2016-04-19 |
| 9259821 |
Chemical mechanical polishing layer formulation with conditioning tolerance |
Bainian Qian, Mark F. Sonnenschein |
2016-02-16 |
| 9259820 |
Chemical mechanical polishing pad with polishing layer and window |
Bainian Qian, James Murnane, Angus Repper, Michelle Jensen, Jeffrey James Hendron +3 more |
2016-02-16 |
| 9238296 |
Multilayer chemical mechanical polishing pad stack with soft and conditionable polishing layer |
James Murnane, Bainian Qian, John G. Nowland, Michelle Jensen, Jeffrey James Hendron +2 more |
2016-01-19 |
| 9238295 |
Soft and conditionable chemical mechanical window polishing pad |
Bainian Qian, Michelle Jensen, Angus Repper, James Murnane, Jeffrey James Hendron +3 more |
2016-01-19 |
| 9233451 |
Soft and conditionable chemical mechanical polishing pad stack |
James Murnane, Bainian Qian, John G. Nowland, Michelle Jensen, Jeffrey James Hendron +2 more |
2016-01-12 |