Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9446497 | Broad spectrum, endpoint detection monophase olefin copolymer window with specific composition in multilayer chemical mechanical polishing pad | Mary Anne Leugers, David B. James, Marty W. DeGroot | 2016-09-20 |
| 9259820 | Chemical mechanical polishing pad with polishing layer and window | Bainian Qian, Marty W. DeGroot, James Murnane, Michelle Jensen, Jeffrey James Hendron +3 more | 2016-02-16 |
| 9238295 | Soft and conditionable chemical mechanical window polishing pad | Bainian Qian, Michelle Jensen, Marty W. DeGroot, James Murnane, Jeffrey James Hendron +3 more | 2016-01-19 |