Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484212 | Chemical mechanical polishing method | Bainian Qian, Marty W. DeGroot, George C. Jacob | 2016-11-01 |
| 9393542 | Multi-stage plasma reactor system with hollow cathodes for cracking carbonaceous material | Xuan Li, Binhang Yan, Changning Wu, Yi-Wen Cheng | 2016-07-19 |
| 9293339 | Method of polishing semiconductor substrate | David Mosley | 2016-03-22 |
| 9275899 | Chemical mechanical polishing composition and method for polishing tungsten | Raymond Lavoie | 2016-03-01 |