Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529257 | Hard mask composition and method for forming pattern using same | Chul-Ho Lee, You-Jung Park, Yong-Woon Yoon, Sung Jae Lee, Young Min Kim +1 more | 2016-12-27 |
| 9513546 | Monomer, hard mask composition comprising said monomer, and method for forming pattern using said hard mask composition | You-Jung Park, Hea-Jung Kim, Yo-Choul PARK, Yong-Woon Yoon, Sung Jae Lee +1 more | 2016-12-06 |
| 9359276 | Monomer for hardmask composition, hardmask composition including monomer, and pattern forming method using hardmask composition | Yoo-Jeong Choi, Hyo-Young Kwon, Yun-Jun Kim, Young Min Kim, Yong-Woon Yoon +1 more | 2016-06-07 |
| 9312122 | Rinse liquid for insulating film and method of rinsing insulating film | Jin-Hee Bae, Han-Song Lee, Wan-Hee Lim, Go-Un Kim, Taek-Soo Kwak +8 more | 2016-04-12 |
| 9284245 | Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition | Sung Jae Lee, Hwan-Sung Cheon, Chul-Ho Lee, Chung-Heon Lee | 2016-03-15 |
| 9244351 | Composition for hardmask, method of forming patterns using the same, and semiconductor integrated circuit device including the patterns | Sung Jae Lee, Joon-Young Moon, Young Min Kim, Yong-Woon Yoon | 2016-01-26 |