Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529257 | Hard mask composition and method for forming pattern using same | Chul-Ho Lee, You-Jung Park, Sung Jae Lee, Youn-Jin Cho, Young Min Kim +1 more | 2016-12-27 |
| 9513546 | Monomer, hard mask composition comprising said monomer, and method for forming pattern using said hard mask composition | You-Jung Park, Hea-Jung Kim, Yo-Choul PARK, Sung Jae Lee, Chul-Ho Lee +1 more | 2016-12-06 |
| 9371444 | Hardmask composition and method of forming patterns using the hardmask composition | Yoo-Jeong Choi, Yun-Jun Kim, Young Min Kim, Joon-Young Moon, Yu-Shin Park +2 more | 2016-06-21 |
| 9359276 | Monomer for hardmask composition, hardmask composition including monomer, and pattern forming method using hardmask composition | Yoo-Jeong Choi, Hyo-Young Kwon, Youn-Jin Cho, Yun-Jun Kim, Young Min Kim +1 more | 2016-06-07 |
| 9244351 | Composition for hardmask, method of forming patterns using the same, and semiconductor integrated circuit device including the patterns | Sung Jae Lee, Joon-Young Moon, Youn-Jin Cho, Young Min Kim | 2016-01-26 |