Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513546 | Monomer, hard mask composition comprising said monomer, and method for forming pattern using said hard mask composition | You-Jung Park, Hea-Jung Kim, Yong-Woon Yoon, Sung Jae Lee, Chul-Ho Lee +1 more | 2016-12-06 |