Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513546 | Monomer, hard mask composition comprising said monomer, and method for forming pattern using said hard mask composition | You-Jung Park, Yo-Choul PARK, Yong-Woon Yoon, Sung Jae Lee, Chul-Ho Lee +1 more | 2016-12-06 |
| 9348229 | Hardmask composition and method of forming patterns using the hardmask composition | Youn-Hee Nam, Sang Kyun Kim, Sung Hwan Kim, Yun-Jun Kim, Joon-Young Moon +1 more | 2016-05-24 |