Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9371444 | Hardmask composition and method of forming patterns using the hardmask composition | Yoo-Jeong Choi, Yun-Jun Kim, Young Min Kim, Yu-Shin Park, Hyun-Ji SONG +2 more | 2016-06-21 |
| 9348229 | Hardmask composition and method of forming patterns using the hardmask composition | Youn-Hee Nam, Hea-Jung Kim, Sang Kyun Kim, Sung Hwan Kim, Yun-Jun Kim +1 more | 2016-05-24 |
| 9244351 | Composition for hardmask, method of forming patterns using the same, and semiconductor integrated circuit device including the patterns | Sung Jae Lee, Youn-Jin Cho, Young Min Kim, Yong-Woon Yoon | 2016-01-26 |