Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9371444 | Hardmask composition and method of forming patterns using the hardmask composition | Yoo-Jeong Choi, Yun-Jun Kim, Young Min Kim, Joon-Young Moon, Yu-Shin Park +2 more | 2016-06-21 |
| 9362030 | Composition for forming silica based insulating layer, silica based insulating layer and method for manufacturing silica based insulating layer | Eun Su Park, Taek-Soo Kwak, Yoong-Hee Na, Han-Song Lee, Seung Hee Hong | 2016-06-07 |
| 9348229 | Hardmask composition and method of forming patterns using the hardmask composition | Youn-Hee Nam, Hea-Jung Kim, Sang Kyun Kim, Sung Hwan Kim, Yun-Jun Kim +1 more | 2016-05-24 |
| 9312122 | Rinse liquid for insulating film and method of rinsing insulating film | Jin-Hee Bae, Han-Song Lee, Wan-Hee Lim, Go-Un Kim, Taek-Soo Kwak +8 more | 2016-04-12 |
| 9240443 | Process of preparing a gap filler agent, a gap filler agent prepared using same, and a method for manufacturing semiconductor capacitor using the gap filler agent | Jin-Hee Bae, Han-Song Lee, Taek-Soo Kwak, Go-Un Kim, Bo-Sun Kim +8 more | 2016-01-19 |