Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494867 | Rinsing liquid for lithography and pattern forming method using same | Yuriko Matsuura, Sara Tsuyuki | 2016-11-15 |
| 9360756 | Composition for forming fine resist pattern and pattern formation method using same | Kazuma Yamamoto, Masahiro Ishii, Takashi Sekito, Hiroshi Yanagita, Shigemasa Nakasugi | 2016-06-07 |