Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494867 | Rinsing liquid for lithography and pattern forming method using same | Sara Tsuyuki, Go Noya | 2016-11-15 |
| 9298095 | Rinse solution for lithography and pattern formation method employing the same | Xiaowei Wang, Georg Pawlowski | 2016-03-29 |