Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9505721 | Aromatic imide compound and method for producing same | Eri Hirahara, Ralph R. Dammel | 2016-11-29 |
| 9482952 | Composition for forming topcoat layer and resist pattern formation method employing the same | Xiaowei Wang, Tetsuo Okayasu, Takafumi KINUTA | 2016-11-01 |
| 9298094 | Composition for forming fine pattern and method for forming fined pattern using same | Toshira Okamura, Masahiro Ishii | 2016-03-29 |
| 9298095 | Rinse solution for lithography and pattern formation method employing the same | Xiaowei Wang, Yuriko Matsuura | 2016-03-29 |