Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9482952 | Composition for forming topcoat layer and resist pattern formation method employing the same | Xiaowei Wang, Georg Pawlowski, Takafumi KINUTA | 2016-11-01 |
| 9448485 | Composition for forming fine resist pattern and pattern forming method using same | Takashi Sekito, Masahiro Ishii | 2016-09-20 |