Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9411232 | Composition for forming fine resist pattern, and pattern formation method using same | Tatsuro Nagahara, Takashi Sekito, Masakazu Kobayashi, Noboru Satake, Masahiro Ishii | 2016-08-09 |
| 9360756 | Composition for forming fine resist pattern and pattern formation method using same | Masahiro Ishii, Takashi Sekito, Hiroshi Yanagita, Shigemasa Nakasugi, Go Noya | 2016-06-07 |