Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9360756 | Composition for forming fine resist pattern and pattern formation method using same | Kazuma Yamamoto, Masahiro Ishii, Takashi Sekito, Hiroshi Yanagita, Go Noya | 2016-06-07 |
| 9328198 | Composition for forming resist underlayer | Masato Suzuki, Jin Li, Motoki Misumi, Yasuaki Ide | 2016-05-03 |