Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9360756 | Composition for forming fine resist pattern and pattern formation method using same | Kazuma Yamamoto, Masahiro Ishii, Takashi Sekito, Shigemasa Nakasugi, Go Noya | 2016-06-07 |
| 9240330 | Method of manufacturing a semiconductor integrated circuit device | Yasuhiro Takeda, Takao Kumihashi, Takashi Takeuchi, Yasushi Matsuda | 2016-01-19 |