Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9482963 | Method of controlling a patterning device in a lithographic apparatus, device manufacturing method and lithographic apparatus | Wouter Frans Willem Mulckhuyse, Erwin John Van Zwet | 2016-11-01 |
| 9372412 | Lithographic apparatus and device manufacturing method | Erwin John Van Zwet, Johannes Onvlee, Erik Fritz | 2016-06-21 |
| 9335638 | Lithographic apparatus, programmable patterning device and lithographic method | Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Cheng-Qun Gui, Johannes Onvlee, Erwin John Van Zwet | 2016-05-10 |
| 9316926 | Lithographic apparatus and device manufacturing method | Erwin John Van Zwet, Johannes Onvlee, Hendrik De Man | 2016-04-19 |
| 9235140 | Lithographic apparatus and device manufacturing method | Erwin John Van Zwet, Johannes Onvlee, Erik Fritz | 2016-01-12 |