Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9335638 | Lithographic apparatus, programmable patterning device and lithographic method | Pieter Willem Herman De Jager, Vadim Yevgenyevich Banine, Cheng-Qun Gui, Johannes Onvlee, Erwin John Van Zwet | 2016-05-10 |
| 9304401 | Measurement of the position of a radiation beam spot in lithography | Felix Godfried Peter Peeters, Michael Jozef Mathijs Renkens, Gregor Edward Van Baars, Jeroen Dekkers | 2016-04-05 |