Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9383195 | Lithographic apparatus and method | Wilhelmus Johannes Maria De Laat, Peter Theodorus Maria Giesen, Marcus Theodoor Wilhelmus Van Der Heijden, Erwin Rinaldo Meinders, Mária Péter | 2016-07-05 |
| 9335638 | Lithographic apparatus, programmable patterning device and lithographic method | Pieter Willem Herman De Jager, Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Johannes Onvlee, Erwin John Van Zwet | 2016-05-10 |